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US Patent Issued to Carl Zeiss MultiSEM on June 23 for "Multi-beam particle beam system" (German Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,159, issued on June 23, was assigned to Carl Zeiss MultiSEM GmbH (Oberkochen, Germany). "Multi-beam particle beam system" was invented by D... Read More


US Patent Issued to Fractilia on June 23 for "System and method for generating and analyzing roughness measurements and their use for process monitoring and control" (Texas Inventor)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,160, issued on June 23, was assigned to Fractilia LLC (Austin, Texas). "System and method for generating and analyzing roughness measuremen... Read More


US Patent Issued to Hitachi High-Tech on June 23 for "Charged particle beam system" (Japanese Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,161, issued on June 23, was assigned to Hitachi High-Tech Corp. (Tokyo). "Charged particle beam system" was invented by Heita Kimizuka (Tok... Read More


US Patent Issued to ASML Netherlands on June 23 for "Dual-use read-out circuitry in charged particle detection system" (German Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,162, issued on June 23, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands). "Dual-use read-out circuitry in charged particle de... Read More


US Patent Issued to Northwestern University on June 23 for "Microchips for use in electron microscopes and related methods" (Illinois Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,163, issued on June 23, was assigned to Northwestern University (Evanston, Ill.). "Microchips for use in electron microscopes and related m... Read More


US Patent Issued to ASML Netherlands on June 23 for "Alignment determination method and computer program" (Dutch Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,164, issued on June 23, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands). "Alignment determination method and computer progra... Read More


US Patent Issued to Carl Zeiss Microscopy on June 23 for "Method for preparing a microscopic sample for FIB/SEM tomography" (Virginia Inventor)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,165, issued on June 23, was assigned to Carl Zeiss Microscopy GmbH (Jena, Germany). "Method for preparing a microscopic sample for FIB/SEM ... Read More


US Patent Issued to Applied Materials on June 23 for "Process chamber and process kits for advanced packaging" (American, Indian Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,166, issued on June 23, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Process chamber and process kits for advanced packag... Read More


US Patent Issued to EN2CORE TECHNOLOGY on June 23 for "Plasma generating apparatus and method for operating same" (South Korean Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,167, issued on June 23, was assigned to EN2CORE TECHNOLOGY INC. (Daejeon, South Korea). "Plasma generating apparatus and method for operati... Read More


US Patent Issued to ASM IP Holding on June 23 for "Wafer processing apparatus using plasma phase shift" (South Korean Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,168, issued on June 23, was assigned to ASM IP Holding B.V. (Almere, Netherlands). "Wafer processing apparatus using plasma phase shift" wa... Read More